June 2011 Archives by date

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Starting: Wed Jun 1 10:45:04 PDT 2011
Ending: Wed Jun 29 07:43:36 PDT 2011
Messages: 56

• Shutdown epi2 SNF 2011-05-29 16:26:09: Broken wafer in transfer chamber   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-05-28 17:14:14: chamber a wafer slide detected   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-05-25 07:30:40: anyone using DSP wafers   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-04-19 10:32:39: dome inspected...clear   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-04-14 14:04:00: SiH4 6% deviation   maurice at snf.stanford.edu
• Germane is low   Ted Berg
• Comment epi2 SNF 2011-06-02 17:21:54: hazy wafers   ehe at snf.stanford.edu
• Problem epi2 SNF 2011-06-03 08:24:14: No Germane   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-03 08:56:43: Cylinder changed with diffusion   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-06-03 08:24:14: No Germane   seymour at snf.stanford.edu
• Comment epi2 SNF 2011-06-03 14:09:00: ok to run germane   seymour at snf.stanford.edu
• Problem epi2 SNF 2011-06-06 23:59:16: Global DOP2 deviated by 45%   sclaussen at snf.stanford.edu
• Low concentration B2H6 is very low   Ted Berg
• Comment epi2 SNF 2011-06-07 06:23:14: Low concentration B2H6 is very low   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-03 08:56:43: Cylinder changed with diffusion   tberg at snf.stanford.edu
• Bad News B2H6 will not be here until tomorrow   Ted Berg
• Comment epi2 SNF 2011-06-08 12:19:13: Changing 100 PPM B2H6 cylinder   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-07 06:23:14: Low concentration B2H6 is very low   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-08 12:40:40: Cylinder is changed and in leak check   tberg at snf.stanford.edu
• B2H6 is here after all   Ted Berg
• Comment epi2 SNF 2011-06-03 14:09:00: ok to run germane   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-06-06 23:59:16: Global DOP2 deviated by 45%   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-08 12:19:13: Changing 100 PPM B2H6 cylinder   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-08 12:40:40: Cylinder is changed and in leak check   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-06-09 13:54:00: DOME coated   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-09 14:40:52: 2 min to Ge etch   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-06-09 13:54:00: DOME coated   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-06-02 17:21:54: hazy wafers   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-06-10 08:00:01: changing HCL cylinder   seymour at snf.stanford.edu
• Shutdown epi2 SNF 2011-06-10 11:07:47: scheduled HCL bottle change   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-06-10 08:00:01: changing HCL cylinder   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-06-10 11:07:47: scheduled HCL bottle change   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-06-13 00:02:34: Centerfinder error   dwnam at snf.stanford.edu
• Problem epi2 SNF 2011-06-13 00:02:34: Centerfinder error   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-14 10:40:52: recommend running multiple etches   ehe at snf.stanford.edu
• Comment epi2 SNF 2011-06-16 07:24:37: Cleaned guardian, back at temp   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-05-24 10:43:21: be sure and enable tool   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-06-20 11:05:59: OK TO RUN NOW? TGO done?   gyama at snf.stanford.edu
• Problem epi2 SNF 2011-06-20 11:05:59: OK TO RUN NOW? TGO done?   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-06-23 13:53:42: dome coated   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-06-24 08:27:40: Removed dome for cleaning   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-16 07:24:37: Cleaned guardian, back at temp   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-27 13:38:45: We may have a dome tomorrow   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-28 07:37:58: dome is installed   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-24 08:27:40: Removed dome for cleaning   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-27 13:38:45: We may have a dome tomorrow   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-06-28 10:06:24: baking out   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-06-28 10:06:24: baking out   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-06-28 07:37:58: dome is installed   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-06-23 13:53:42: dome coated   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-06-28 17:56:19: Cabinet Open Error   edfei at snf.stanford.edu
• Comment epi2 SNF 2011-06-28 18:16:24: Ignore previous message   edfei at snf.stanford.edu
• Problem epi2 SNF 2011-06-28 17:56:19: Cabinet Open Error   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-06-28 18:16:24: Ignore previous message   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-06-28 19:05:26: No More HCL   edfei at snf.stanford.edu
• Problem epi2 SNF 2011-06-28 19:05:26: No More HCL   tberg at snf.stanford.edu

Last message date: Wed Jun 29 07:43:36 PDT 2011
Archived on: Sun Dec 23 08:52:59 PST 2012

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