From eenriquez at snf.stanford.edu Tue Mar 1 10:12:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Mar 2011 10:12:36 -0800 Subject: Comment epi2 SNF 2011-03-01 10:12:35: Update stuck wafer Message-ID: Recoved the user's wafer and left it in LLB From eenriquez at snf.stanford.edu Tue Mar 1 14:11:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Mar 2011 14:11:52 -0800 Subject: Shutdown epi2 SNF 2011-02-28 18:11:59: wafer stuck in Chamber A Message-ID: Recoved the user's wafer and placed in LLB. Lubricated the lift cylinder.Adjusted the wafer lift speed. Process position to Exchange = 4 seconds and Exch to Proc = 6 sec. Cycled the lift many times at both Cold Idle and Active idle without failure. From ehe at snf.stanford.edu Tue Mar 1 23:45:54 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 1 Mar 2011 23:45:54 -0800 Subject: Problem epi2 SNF 2011-03-01 23:45:54: chA lift problem Message-ID: After loading, load lock A door wouldn't close. After getting around that problem, lift problem caused wafer to be stuck in chA and couldn't run any processes (same problem reported by edfei). We tried everything, couldn't fix this one... abandoned wafer. From tberg at snf.stanford.edu Wed Mar 2 07:21:43 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Mar 2011 07:21:43 -0800 Subject: Problem epi2 SNF 2011-03-01 23:45:54: chA lift problem Message-ID: Cycled lift removed wafer From tberg at snf.stanford.edu Wed Mar 2 07:22:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Mar 2011 07:22:44 -0800 Subject: Comment epi2 SNF 2011-02-22 14:20:20: broken wafer and wand in chamber F Message-ID: Removed broken wafer and pins replaced blade and pins From tberg at snf.stanford.edu Wed Mar 2 07:22:51 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Mar 2011 07:22:51 -0800 Subject: Comment epi2 SNF 2011-02-23 14:48:19: FS is here Message-ID: Removed broken wafer and pins replaced blade and pins From tberg at snf.stanford.edu Wed Mar 2 07:23:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Mar 2011 07:23:13 -0800 Subject: Comment epi2 SNF 2011-02-24 17:35:39: wafer handling seems okay Message-ID: Noted From fungus at snf.stanford.edu Wed Mar 2 11:23:43 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:23:43 -0800 Subject: Shutdown epi2 SNF 2011-03-02 11:23:42: Lift issues in chA Message-ID: wafer stuck in chA lift problems From maurice at snf.stanford.edu Wed Mar 2 11:44:11 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:44:11 -0800 Subject: Shutdown epi2 SNF 2011-03-02 11:23:42: Lift issues in chA Message-ID: cooled chamber, reset chamber and removed wafer From fungus at snf.stanford.edu Wed Mar 2 11:59:02 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:59:02 -0800 Subject: Shutdown epi2 SNF 2011-03-02 11:59:01: wafer stuck in tranfer station Message-ID: claims there is no wafer on tranfer arm when it tried to load the wafer into the chamberA From tberg at snf.stanford.edu Thu Mar 3 08:57:15 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 Mar 2011 08:57:15 -0800 Subject: Shutdown epi2 SNF 2011-03-02 11:59:01: wafer stuck in tranfer station Message-ID: no apparent wafers in the system. Adjusted lifter speeds and cycled it hot and cold no problem. Ran geetchcoat fine From maurice at snf.stanford.edu Thu Mar 3 09:53:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Mar 2011 09:53:19 -0800 Subject: Comment epi2 SNF 2011-03-01 10:12:35: Update stuck wafer Message-ID: logged From maurice at snf.stanford.edu Thu Mar 3 09:55:04 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Mar 2011 09:55:04 -0800 Subject: Problem epi2 SNF 2011-02-08 00:39:54: LLA Pump Message-ID: we have not seeing LLA pump issues since this report From maurice at snf.stanford.edu Thu Mar 3 09:56:21 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Mar 2011 09:56:21 -0800 Subject: Problem epi2 SNF 2010-11-03 08:09:43: Use LLA for loading wafers Message-ID: Ted and AMAT FS have fixed the LLB mapping issue From fungus at snf.stanford.edu Thu Mar 3 20:41:30 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 3 Mar 2011 20:41:30 -0800 Subject: Comment epi2 SNF 2011-03-03 20:41:30: Particles maybe Message-ID: Some of my wafers unloaded with particles. Ran GE ETCH COAT 3x. Reloaded fresh wafers to test out chamber in high temp bake and there were no particles unloaded. From fungus at snf.stanford.edu Fri Mar 4 08:58:11 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 4 Mar 2011 08:58:11 -0800 Subject: Problem epi2 SNF 2011-03-04 08:58:10: particles in loading chamber Message-ID: there are large flaky particles coming out of LLA and LLB from processed wafers. Also dop1 flow is 7% off from setpoint. and set a warning. From fungus at snf.stanford.edu Fri Mar 4 09:19:25 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 4 Mar 2011 09:19:25 -0800 Subject: Shutdown epi2 SNF 2011-03-04 09:19:24: dome coated Message-ID: From tberg at snf.stanford.edu Mon Mar 7 14:20:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Mar 2011 14:20:50 -0800 Subject: Comment epi2 SNF 2011-03-07 14:20:49: Epi Progress Message-ID: Chamber stripped down dome was devitrified beyond use, lower gas ring was broken-it is ordered with no ETA. Parts cleaned, lower dome looks OK. Will update as i find out more From tberg at snf.stanford.edu Tue Mar 8 12:54:01 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Mar 2011 12:54:01 -0800 Subject: Comment epi2 SNF 2011-03-08 12:54:01: update Message-ID: Part is ordered no ETA yet. Will advise From tberg at snf.stanford.edu Wed Mar 9 14:08:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 9 Mar 2011 14:08:49 -0800 Subject: Comment epi2 SNF 2011-03-09 14:08:48: System is back together Message-ID: System is back together. Dome, lower chamber liners replaced. Leak check completed. Maurice is checking it out. From maurice at snf.stanford.edu Wed Mar 9 14:41:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Mar 2011 14:41:29 -0800 Subject: Shutdown epi2 SNF 2011-03-09 14:41:28: Active idle power changed to 18kw Message-ID: The active idle power was changed to 18Kw so we can bake out the system. It need to be changed back to 12kw before releasing to the users. From maurice at snf.stanford.edu Thu Mar 10 10:05:59 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:05:59 -0800 Subject: Shutdown epi2 SNF 2011-03-04 09:19:24: dome coated Message-ID: System is back together. Dome, lower chamber liners replaced. Leak check completed. Maurice is checking it out. From maurice at snf.stanford.edu Thu Mar 10 10:06:22 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:06:22 -0800 Subject: Comment epi2 SNF 2011-03-08 12:54:01: update Message-ID: parts installed!! From maurice at snf.stanford.edu Thu Mar 10 10:06:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:06:38 -0800 Subject: Comment epi2 SNF 2011-03-07 14:20:49: Epi Progress Message-ID: logged From maurice at snf.stanford.edu Thu Mar 10 10:06:56 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:06:56 -0800 Subject: Comment epi2 SNF 2011-03-10 10:06:55: Testing for haze Message-ID: From maurice at snf.stanford.edu Thu Mar 10 10:07:27 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:07:27 -0800 Subject: Problem epi2 SNF 2011-03-04 08:58:10: particles in loading chamber Message-ID: found dome coated...too much deposition From maurice at snf.stanford.edu Thu Mar 10 10:07:44 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:07:44 -0800 Subject: Comment epi2 SNF 2011-03-03 20:41:30: Particles maybe Message-ID: dome coated From maurice at snf.stanford.edu Thu Mar 10 10:08:11 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:08:11 -0800 Subject: Comment epi2 SNF 2011-02-27 17:44:29: Chamber A Lift Problem Message-ID: wafer lift has been adjusted From maurice at snf.stanford.edu Thu Mar 10 10:08:47 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:08:47 -0800 Subject: Comment epi2 SNF 2011-02-24 14:50:32: lifter is having issues Message-ID: lift speed adjusted From maurice at snf.stanford.edu Thu Mar 10 15:01:40 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 15:01:40 -0800 Subject: Comment epi2 SNF 2011-03-10 10:06:55: Testing for haze Message-ID: After hours of baking and a few etches the 1000c Si deposition is depositing haze free. From maurice at snf.stanford.edu Thu Mar 10 15:02:18 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 15:02:18 -0800 Subject: Shutdown epi2 SNF 2011-03-09 14:41:28: Active idle power changed to 18kw Message-ID: Chaged the active idle temp back to 12kw From maurice at snf.stanford.edu Thu Mar 10 16:45:27 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 16:45:27 -0800 Subject: Problem epi2 SNF 2011-03-10 16:45:27: DCS flow flucuating Message-ID: with the setpoint @200sccm flow from 32 to 750sccm From fungus at snf.stanford.edu Thu Mar 10 17:23:23 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 10 Mar 2011 17:23:23 -0800 Subject: Comment epi2 SNF 2011-03-10 17:23:22: DCS flow ok Message-ID: Purged DCS line for 1hr and the flow has stabilized. GE ETCH COAT works. From maurice at snf.stanford.edu Thu Mar 10 21:13:58 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 21:13:58 -0800 Subject: Problem epi2 SNF 2011-03-10 16:45:27: DCS flow flucuating Message-ID: Fungus reports: Purged DCS line for 1hr and the flow has stabilized. GE ETCH COAT works. From dwnam at snf.stanford.edu Fri Mar 11 09:18:25 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Fri, 11 Mar 2011 09:18:25 -0800 Subject: Problem epi2 SNF 2011-03-11 09:18:24: Sudden rise of pressure Message-ID: Failed half of my wafers due to sudden rise of chamber pressure. From fungus at snf.stanford.edu Fri Mar 11 14:02:51 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 11 Mar 2011 14:02:51 -0800 Subject: Comment epi2 SNF 2011-03-11 14:02:50: Epi2 run ok Message-ID: Ran 3 wafers using the sequence after Ted helped me get out of previous chamber pressure errors. Looks ok. From junam at snf.stanford.edu Fri Mar 11 15:23:49 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 11 Mar 2011 15:23:49 -0800 Subject: Problem epi2 SNF 2011-03-11 15:23:49: LLA mapping error Message-ID: used LLB instead From junam at snf.stanford.edu Fri Mar 11 17:17:36 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 11 Mar 2011 17:17:36 -0800 Subject: Problem epi2 SNF 2011-03-11 17:17:36: pressure error Message-ID: "chamber a detected abnormal pressure rise from 641 to 751 tor" From junam at snf.stanford.edu Fri Mar 11 17:52:12 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 11 Mar 2011 17:52:12 -0800 Subject: Problem epi2 SNF 2011-03-11 17:52:11: wafer stuck Message-ID: two wafers stuck in the tool: one in transfer chamber and one in cooling. From grahamab at snf.stanford.edu Sat Mar 12 16:30:22 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 12 Mar 2011 16:30:22 -0800 Subject: Comment epi2 SNF 2011-03-12 16:30:22: wafers removed; okay to use Message-ID: removed the two "stuck" wafers from the system back into load lock B. system should be okay to use again, barring any other problems. From narii at snf.stanford.edu Sun Mar 13 20:14:40 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 13 Mar 2011 20:14:40 -0700 Subject: Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error Message-ID: Looks like there is a problem with transfer arm. There is a wafer on its arm, and it keeps saying transfer to LL is not safe. From maurice at snf.stanford.edu Mon Mar 14 09:55:30 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Mar 2011 09:55:30 -0700 Subject: Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error Message-ID: homed transfer arm and removed wafer From maurice at snf.stanford.edu Mon Mar 14 09:55:59 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Mar 2011 09:55:59 -0700 Subject: Problem epi2 SNF 2011-03-11 17:52:11: wafer stuck Message-ID: Andrew removed wafer From maurice at snf.stanford.edu Mon Mar 14 09:57:06 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Mar 2011 09:57:06 -0700 Subject: Problem epi2 SNF 2011-03-11 17:17:36: pressure error Message-ID: was this during an etch or your run? what step? From fungus at snf.stanford.edu Mon Mar 14 12:13:26 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Mon, 14 Mar 2011 12:13:26 -0700 Subject: Shutdown epi2 SNF 2011-03-14 12:13:25: LLB will not load, LLA stuck in error mode Message-ID: Loaded wafers into LLB but wafers will not load into the transfer arm. Claims Buf/LL have different gasses. LLA is still "mapping" position 19 for the past 2 hrs. Cannot change status. From maurice at snf.stanford.edu Mon Mar 14 13:07:24 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Mar 2011 13:07:24 -0700 Subject: Shutdown epi2 SNF 2011-03-14 12:13:25: LLB will not load, LLA stuck in error mode Message-ID: Reset Xfer chamber. Moved wafer into transfer chamber From ehe at snf.stanford.edu Mon Mar 14 19:32:34 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 14 Mar 2011 19:32:34 -0700 Subject: Problem epi2 SNF 2011-03-14 19:32:33: wafer handler lost wafer, can't proceed Message-ID: Wafer seemed to be lost between move from Ch:A to the transfer chamber. Error message when trying to move the wafer from the transfer chamber: "Chamber F there is no wafer on blade." Same problem we saw before. From tberg at snf.stanford.edu Tue Mar 15 10:14:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Mar 2011 10:14:56 -0700 Subject: Shutdown epi2 SNF 2011-03-15 10:14:56: wafer in chamber-broken pin Message-ID: wafer in chamber-broken pin will have to vent chamber From tberg at snf.stanford.edu Tue Mar 15 14:08:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Mar 2011 14:08:56 -0700 Subject: Comment epi2 SNF 2011-03-15 14:08:56: wafer is removed Message-ID: wafer is removed FS is checking out handling and wafer positions From tberg at snf.stanford.edu Wed Mar 16 14:11:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Mar 2011 14:11:25 -0700 Subject: Problem epi2 SNF 2011-03-16 14:11:25: LL pump not showing status Message-ID: Reset TIM on the pump and checked operation From maurice at snf.stanford.edu Wed Mar 16 17:50:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:50:36 -0700 Subject: Shutdown epi2 SNF 2011-03-15 10:14:56: wafer in chamber-broken pin Message-ID: Wafer removed Wafer lift pin replaced System reset to recover control of LLA Wafer handling from both loadlocks calibrated Interface between system and loadlock pump reset System bake and etched Si deposition completed and is haze free system back to users From maurice at snf.stanford.edu Wed Mar 16 17:50:56 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:50:56 -0700 Subject: Problem epi2 SNF 2011-03-16 14:11:25: LL pump not showing status Message-ID: logged From maurice at snf.stanford.edu Wed Mar 16 17:51:23 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:51:23 -0700 Subject: Problem epi2 SNF 2011-03-14 19:32:33: wafer handler lost wafer, can't proceed Message-ID: Wafer removed Wafer lift pin replaced Wafer handling from both loadlocks calibrated From maurice at snf.stanford.edu Wed Mar 16 17:51:39 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:51:39 -0700 Subject: Comment epi2 SNF 2011-03-12 16:30:22: wafers removed; okay to use Message-ID: Wafer handling from both loadlocks calibrated From maurice at snf.stanford.edu Wed Mar 16 17:52:06 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:52:06 -0700 Subject: Problem epi2 SNF 2011-03-11 15:23:49: LLA mapping error Message-ID: System reset to recover control of LLA From maurice at snf.stanford.edu Wed Mar 16 17:52:18 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:52:18 -0700 Subject: Comment epi2 SNF 2011-03-10 17:23:22: DCS flow ok Message-ID: logged From maurice at snf.stanford.edu Wed Mar 16 17:52:28 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:52:28 -0700 Subject: Comment epi2 SNF 2011-03-11 14:02:50: Epi2 run ok Message-ID: logged From maurice at snf.stanford.edu Wed Mar 16 17:52:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:52:38 -0700 Subject: Comment epi2 SNF 2011-03-09 14:08:48: System is back together Message-ID: logged From maurice at snf.stanford.edu Wed Mar 16 17:52:53 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:52:53 -0700 Subject: Comment epi2 SNF 2011-03-15 14:08:56: wafer is removed Message-ID: logged From edfei at snf.stanford.edu Fri Mar 18 00:05:12 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Fri, 18 Mar 2011 00:05:12 -0700 Subject: Comment epi2 SNF 2011-03-18 00:05:12: Ge Etch Coat Pressure Error Message-ID: Ge Etch Coat triggered overpressure error again and made the chamber go into isolation. Could not get the chamber to get out of isolation. The console stated that the N2 pressure was too low for inert idle state. From junam at snf.stanford.edu Fri Mar 18 01:12:29 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 18 Mar 2011 01:12:29 -0700 Subject: Comment epi2 SNF 2011-03-18 01:12:28: Ge Etch Coat Pressure Error Message-ID: Chamber pressure error ocurred at the end of the prevous user's run (see edfei's comment). Could bring the chamber back to online. Ran Ge Etch Coat, and did not encounter the pressure error. Running my samples now. From grahamab at snf.stanford.edu Fri Mar 18 10:37:28 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 18 Mar 2011 10:37:28 -0700 Subject: Comment epi2 SNF 2011-03-18 10:37:27: had another overpressure error last night Message-ID: found it this morning with an error from junam's wafers. cleared everything and was putting back to active idle when next user showed up (who ran the germanium etch coat). From mtang at snf.stanford.edu Sun Mar 20 03:50:25 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 20 Mar 2011 03:50:25 -0700 Subject: Problem epi2 SNF 2011-03-20 03:50:24: DCS Shut offNo dichlorosilane Message-ID: The DCS alarm sensor in the lab appears to be noisy, so it has been disabled and DCS shut off. Troubleshooting the sensor to continue Monday. Do not use Dichlorosilane on Epi2 From junam at snf.stanford.edu Sun Mar 20 15:08:00 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 20 Mar 2011 15:08:00 -0700 Subject: Problem epi2 SNF 2011-03-20 15:07:59: scrubber fault Message-ID: Came in and foud out that the previous user's run has encountered an error and a wafer stuck inside the chamber. Initial error was: "chamber A lower temperature setpoint deviation error" Tried to reset the chamber and take the wafer out, but "Chamber A scrubber fault" occurred. Could not take the wafer out. From maurice at snf.stanford.edu Mon Mar 21 09:21:10 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 Mar 2011 09:21:10 -0700 Subject: Problem epi2 SNF 2011-03-20 15:07:59: scrubber fault Message-ID: reset From maurice at snf.stanford.edu Mon Mar 21 09:25:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 Mar 2011 09:25:19 -0700 Subject: Comment epi2 SNF 2011-03-21 09:25:19: removed wafer from transfer chamber Message-ID: someone had left the LLB cassette out of the LL (and then created a wafer in the loadlock?!?!?!). Transfered wafer in to LLA From tberg at snf.stanford.edu Mon Mar 21 10:13:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Mar 2011 10:13:56 -0700 Subject: Problem epi2 SNF 2011-03-20 03:50:24: DCS Shut offNo dichlorosilane Message-ID: DCS is back on Ran both Thermco and Tylan nitride with no issues. Sensor D41 was replaced From jasonlin at snf.stanford.edu Tue Mar 22 00:20:11 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 22 Mar 2011 00:20:11 -0700 Subject: Problem epi2 SNF 2011-03-22 00:20:11: ChA failed to reach end condition error Message-ID: "Ch A failed to reach end condition for step 4" Seems like a recipe issue, so I'm running my process now. From maurice at snf.stanford.edu Tue Mar 22 11:22:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 Mar 2011 11:22:19 -0700 Subject: Shutdown epi2 SNF 2011-03-22 11:22:19: dome coated Message-ID: Fuse reported deposition in areas he doesn't normally get deposition in his selctive growth process. - Inspected the dome and found it coated. - We will run a few etches and inspect dome again From maurice at snf.stanford.edu Tue Mar 22 11:25:55 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 Mar 2011 11:25:55 -0700 Subject: Comment epi2 SNF 2011-03-22 11:25:55: Ge etch recipe pressure 450torr Message-ID: Ge etch recipe pressure has been reduced from 600torr to 450 torr From maurice at snf.stanford.edu Tue Mar 22 16:36:27 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 Mar 2011 16:36:27 -0700 Subject: Problem epi2 SNF 2011-03-22 16:36:26: Devitrificated upper dome Message-ID: From tberg at snf.stanford.edu Thu Mar 24 12:52:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Mar 2011 12:52:21 -0700 Subject: Problem epi2 SNF 2011-03-22 16:36:26: Devitrificated upper dome Message-ID: Replaced upper dome, cleaned other quartz. Re assemble4d, Baked in active idle for 2 hours. Ran Mo etch. Checked blower pressure at 4 " for the top. Checked HCl pressure. Baking in active idle From tberg at stanford.edu Thu Mar 24 12:56:17 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 24 Mar 2011 12:56:17 -0700 Subject: Epi status update Message-ID: <4D8BA1E1.8020402@stanford.edu> Replaced upper dome, cleaned other quartz. Re assembled, Baked in active idle for 2 hours. Ran Mo etch. Checked blower pressure at 4 " for the top. Checked HCl pressure. Baking in active idle. From tberg at snf.stanford.edu Fri Mar 25 07:50:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 Mar 2011 07:50:11 -0700 Subject: Comment epi2 SNF 2011-03-25 07:50:11: Ready for test Message-ID: Ran long bake-overnight did leak check approx7mT per min did etch coat without problems. should be ready for test From maurice at snf.stanford.edu Fri Mar 25 16:37:32 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Mar 2011 16:37:32 -0700 Subject: Shutdown epi2 SNF 2011-03-22 11:22:19: dome coated Message-ID: dome replaced, system baked out, chaber etched, silicon test was haze free From narii at snf.stanford.edu Tue Mar 29 12:30:25 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 29 Mar 2011 12:30:25 -0700 Subject: Comment epi2 SNF 2011-03-29 12:30:24: Ge etch coat failed to reach temperature Message-ID: At step 6, it needs over 1185C to move on to next step. However, it often failed to do so until end of the step. From maurice at snf.stanford.edu Wed Mar 30 09:38:03 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Mar 2011 09:38:03 -0700 Subject: Comment epi2 SNF 2011-03-30 09:38:03: Dome inspected/ clear Message-ID: dome clear From maurice at snf.stanford.edu Wed Mar 30 11:57:10 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Mar 2011 11:57:10 -0700 Subject: Comment epi2 SNF 2011-03-29 12:30:24: Ge etch coat failed to reach temperature Message-ID: Increased the power in the Silicon etch portion of the program to 50Kw. This step has been changed from temp constrolled to constant power. This should keep the system from reaching max power if the dome is coated. From tberg at snf.stanford.edu Thu Mar 31 07:51:45 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 31 Mar 2011 07:51:45 -0700 Subject: Comment epi2 SNF 2011-03-31 07:51:44: cleaned scrubber and burnbox inlets Message-ID: From tberg at snf.stanford.edu Thu Mar 31 08:29:55 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 31 Mar 2011 08:29:55 -0700 Subject: Comment epi2 SNF 2011-03-31 08:29:54: ran geetch coat Message-ID: