Shutdown epi2 SNF 2011-02-28 18:11:59: wafer stuck in Chamber A

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 1 14:11:52 PST 2011


Recoved the user's wafer and placed in LLB.  Lubricated the lift cylinder.Adjusted the wafer lift speed.  Process position to Exchange = 4 seconds and Exch to Proc = 6 sec.  Cycled the lift many times at both Cold Idle and Active idle without failure.




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