Problem epi2 SNF 2011-03-01 23:45:54: chA lift problem

ehe at snf.stanford.edu ehe at snf.stanford.edu
Tue Mar 1 23:45:54 PST 2011


After loading, load lock A door wouldn't close. After getting around that problem, lift problem caused wafer to be stuck in chA and couldn't run any processes (same problem reported by edfei). We tried everything, couldn't fix this one... abandoned wafer.




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