Shutdown epi2 SNF 2011-03-02 11:23:42: Lift issues in chA
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Wed Mar 2 11:44:11 PST 2011
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Shutdown epi2 SNF 2011-03-02 11:23:42: Lift issues in chA
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Shutdown epi2 SNF 2011-03-02 11:59:01: wafer stuck in tranfer station
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cooled chamber, reset chamber and removed wafer
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Shutdown epi2 SNF 2011-03-02 11:23:42: Lift issues in chA
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Shutdown epi2 SNF 2011-03-02 11:59:01: wafer stuck in tranfer station
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