Shutdown epi2 SNF 2011-03-02 11:59:01: wafer stuck in tranfer station
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Thu Mar 3 08:57:15 PST 2011
no apparent wafers in the system. Adjusted lifter speeds and cycled it hot and cold no problem. Ran geetchcoat fine
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