Problem epi2 SNF 2010-11-03 08:09:43: Use LLA for loading wafers
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Mar 3 09:56:21 PST 2011
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Problem epi2 SNF 2011-02-08 00:39:54: LLA Pump
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Comment epi2 SNF 2011-03-03 20:41:30: Particles maybe
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Ted and AMAT FS have fixed the LLB mapping issue
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Problem epi2 SNF 2011-02-08 00:39:54: LLA Pump
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Comment epi2 SNF 2011-03-03 20:41:30: Particles maybe
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