Comment epi2 SNF 2011-03-03 20:41:30: Particles maybe

fungus at snf.stanford.edu fungus at snf.stanford.edu
Thu Mar 3 20:41:30 PST 2011


Some of my wafers unloaded with particles.  Ran GE ETCH COAT 3x.  Reloaded fresh wafers to test out chamber in high temp bake and there were no particles unloaded.  




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