Problem epi2 SNF 2011-03-04 08:58:10: particles in loading chamber

fungus at snf.stanford.edu fungus at snf.stanford.edu
Fri Mar 4 08:58:11 PST 2011


there are large flaky particles coming out of LLA and LLB from processed wafers.  Also dop1 flow is 7% off from setpoint. and set a warning.




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