Problem epi2 SNF 2011-03-10 16:45:27: DCS flow flucuating
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Mar 10 16:45:27 PST 2011
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Comment epi2 SNF 2011-02-24 14:50:32: lifter is having issues
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Problem epi2 SNF 2011-03-10 16:45:27: DCS flow flucuating
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with the setpoint @200sccm flow from 32 to 750sccm
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Comment epi2 SNF 2011-02-24 14:50:32: lifter is having issues
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Problem epi2 SNF 2011-03-10 16:45:27: DCS flow flucuating
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