Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Mar 14 09:55:30 PDT 2011
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Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error
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homed transfer arm and removed wafer
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Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error
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Shutdown epi2 SNF 2011-03-14 12:13:25: LLB will not load, LLA stuck in error mode
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