Problem epi2 SNF 2011-03-11 17:17:36: pressure error
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Mar 14 09:57:06 PDT 2011
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Problem epi2 SNF 2011-03-11 17:17:36: pressure error
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was this during an etch or your run? what step?
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Problem epi2 SNF 2011-03-11 17:17:36: pressure error
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Problem epi2 SNF 2011-03-11 17:52:11: wafer stuck
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