Shutdown epi2 SNF 2011-03-14 12:13:25: LLB will not load, LLA stuck in error mode

fungus at snf.stanford.edu fungus at snf.stanford.edu
Mon Mar 14 12:13:26 PDT 2011


Loaded wafers into LLB but wafers will not load into the transfer arm.  Claims Buf/LL have different gasses. 
LLA is still "mapping" position 19 for the past 2 hrs.  Cannot change status.  




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