Shutdown epi2 SNF 2011-03-14 12:13:25: LLB will not load, LLA stuck in error mode
fungus at snf.stanford.edu
fungus at snf.stanford.edu
Mon Mar 14 12:13:26 PDT 2011
Loaded wafers into LLB but wafers will not load into the transfer arm. Claims Buf/LL have different gasses.
LLA is still "mapping" position 19 for the past 2 hrs. Cannot change status.
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