Problem epi2 SNF 2011-03-14 19:32:33: wafer handler lost wafer, can't proceed

ehe at snf.stanford.edu ehe at snf.stanford.edu
Mon Mar 14 19:32:34 PDT 2011


Wafer seemed to be lost between move from Ch:A to the transfer chamber. Error message when trying to move the wafer from the transfer chamber: "Chamber F there is no wafer on blade." Same problem we saw before. 




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