Comment epi2 SNF 2011-03-15 14:08:56: wafer is removed
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Tue Mar 15 14:08:56 PDT 2011
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wafer is removed FS is checking out handling and wafer positions
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Shutdown epi2 SNF 2011-03-15 10:14:56: wafer in chamber-broken pin
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Comment epi2 SNF 2011-03-15 14:08:56: wafer is removed
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