Shutdown epi2 SNF 2011-03-15 10:14:56: wafer in chamber-broken pin

[maurice at snf.stanford.edu]

Wafer removed
Wafer lift pin replaced
System reset to recover control of LLA
Wafer handling from both loadlocks calibrated
Interface between system and loadlock pump reset
System bake and etched
Si deposition completed and is haze free
system back to users