Comment epi2 SNF 2011-03-12 16:30:22: wafers removed; okay to use
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Wed Mar 16 17:51:39 PDT 2011
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Comment epi2 SNF 2011-03-12 16:30:22: wafers removed; okay to use
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Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error
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Wafer handling from both loadlocks calibrated
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Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error
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