Comment epi2 SNF 2011-03-18 00:05:12: Ge Etch Coat Pressure Error

edfei at snf.stanford.edu edfei at snf.stanford.edu
Fri Mar 18 00:05:12 PDT 2011


Ge Etch Coat triggered overpressure error again and made the chamber go into isolation.  Could not get the chamber to get out of isolation.  The console stated that the N2 pressure was too low for inert idle state.




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