Comment epi2 SNF 2011-03-18 01:12:28: Ge Etch Coat Pressure Error

junam at snf.stanford.edu junam at snf.stanford.edu
Fri Mar 18 01:12:29 PDT 2011


Chamber pressure error ocurred at the end of the prevous user's run (see edfei's comment). Could bring the chamber back to online. Ran Ge Etch Coat, and did not encounter the pressure error. Running my samples now.




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