Comment epi2 SNF 2011-03-18 10:37:27: had another overpressure error last night

grahamab at grahamab at
Fri Mar 18 10:37:28 PDT 2011

found it this morning with an error from junam's wafers.  cleared everything and was putting back to active idle when next user showed up (who ran the germanium etch coat).  

More information about the epi2-pcs mailing list