Comment epi2 SNF 2011-03-18 10:37:27: had another overpressure error last night

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Mar 18 10:37:28 PDT 2011


found it this morning with an error from junam's wafers.  cleared everything and was putting back to active idle when next user showed up (who ran the germanium etch coat).  




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