Problem epi2 SNF 2011-03-20 03:50:24: DCS Shut offNo dichlorosilane

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sun Mar 20 03:50:25 PDT 2011


The DCS alarm sensor in the lab appears to be noisy, so it has been disabled and DCS shut off.  Troubleshooting the sensor to continue Monday.  Do not use Dichlorosilane on Epi2




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