Problem epi2 SNF 2011-03-20 15:07:59: scrubber fault

junam at snf.stanford.edu junam at snf.stanford.edu
Sun Mar 20 15:08:00 PDT 2011


Came in and foud out that the previous user's run has encountered an error and a wafer stuck inside the chamber.
Initial error was: "chamber A lower temperature setpoint deviation error"
Tried to reset the chamber and take the wafer out, but "Chamber A scrubber fault" occurred. Could not take the wafer out.




More information about the epi2-pcs mailing list