Comment epi2 SNF 2011-03-21 09:25:19: removed wafer from transfer chamber
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Mar 21 09:25:19 PDT 2011
someone had left the LLB cassette out of the LL (and then created a wafer in the loadlock?!?!?!).
Transfered wafer in to LLA
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