Shutdown epi2 SNF 2011-03-22 11:22:19: dome coated

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Mar 22 11:22:19 PDT 2011


Fuse reported deposition in areas he doesn't normally get deposition in his selctive growth process.
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Inspected the dome and found it coated.
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We will run a few etches and inspect dome again




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