Problem epi2 SNF 2011-03-22 16:36:26: Devitrificated upper dome

tberg at snf.stanford.edu tberg at snf.stanford.edu
Thu Mar 24 12:52:21 PDT 2011


Replaced upper dome, cleaned other quartz. Re assemble4d, Baked  in active idle for 2 hours. Ran Mo etch. Checked blower pressure at 4 " for the top. Checked HCl pressure. Baking in active idle




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