Comment epi2 SNF 2011-03-29 12:30:24: Ge etch coat failed to reach temperature

narii at snf.stanford.edu narii at snf.stanford.edu
Tue Mar 29 12:30:25 PDT 2011


At step 6, it needs over 1185C to move on to next step. However, it often failed to do so until end of the step.




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