Comment epi2 SNF 2011-03-29 12:30:24: Ge etch coat failed to reach temperature

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Mar 30 11:57:10 PDT 2011


Increased the power in the Silicon etch portion of the program to 50Kw.
This step has been changed from temp constrolled to constant power.
This should keep the system from reaching max power if the dome is coated.




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