March 2011 Archives by thread

• Messages sorted by: [ subject ] [ author ] [ date ]
• More info on this list...

Starting: Tue Mar 1 10:12:36 PST 2011
Ending: Thu Mar 31 08:29:55 PDT 2011
Messages: 80

• Comment epi2 SNF 2011-03-01 10:12:35: Update stuck wafer   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2011-03-01 10:12:35: Update stuck wafer   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-28 18:11:59: wafer stuck in Chamber A   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2011-03-01 23:45:54: chA lift problem   ehe at snf.stanford.edu
  • Problem epi2 SNF 2011-03-01 23:45:54: chA lift problem   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-22 14:20:20: broken wafer and wand in chamber F   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-23 14:48:19: FS is here   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-24 17:35:39: wafer handling seems okay   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-03-02 11:23:42: Lift issues in chA   fungus at snf.stanford.edu
  • Shutdown epi2 SNF 2011-03-02 11:23:42: Lift issues in chA   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-03-02 11:59:01: wafer stuck in tranfer station   fungus at snf.stanford.edu
  • Shutdown epi2 SNF 2011-03-02 11:59:01: wafer stuck in tranfer station   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-02-08 00:39:54: LLA Pump   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-11-03 08:09:43: Use LLA for loading wafers   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-03 20:41:30: Particles maybe   fungus at snf.stanford.edu
  • Comment epi2 SNF 2011-03-03 20:41:30: Particles maybe   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-04 08:58:10: particles in loading chamber   fungus at snf.stanford.edu
  • Problem epi2 SNF 2011-03-04 08:58:10: particles in loading chamber   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-03-04 09:19:24: dome coated   fungus at snf.stanford.edu
  • Shutdown epi2 SNF 2011-03-04 09:19:24: dome coated   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-07 14:20:49: Epi Progress   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-03-07 14:20:49: Epi Progress   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-08 12:54:01: update   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-03-08 12:54:01: update   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-09 14:08:48: System is back together   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-03-09 14:08:48: System is back together   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-03-09 14:41:28: Active idle power changed to 18kw   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2011-03-09 14:41:28: Active idle power changed to 18kw   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-10 10:06:55: Testing for haze   maurice at snf.stanford.edu
  • Comment epi2 SNF 2011-03-10 10:06:55: Testing for haze   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-02-27 17:44:29: Chamber A Lift Problem   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-02-24 14:50:32: lifter is having issues   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-10 16:45:27: DCS flow flucuating   maurice at snf.stanford.edu
  • Problem epi2 SNF 2011-03-10 16:45:27: DCS flow flucuating   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-10 17:23:22: DCS flow ok   fungus at snf.stanford.edu
  • Comment epi2 SNF 2011-03-10 17:23:22: DCS flow ok   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-11 09:18:24: Sudden rise of pressure   dwnam at snf.stanford.edu
• Comment epi2 SNF 2011-03-11 14:02:50: Epi2 run ok   fungus at snf.stanford.edu
  • Comment epi2 SNF 2011-03-11 14:02:50: Epi2 run ok   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-11 15:23:49: LLA mapping error   junam at snf.stanford.edu
  • Problem epi2 SNF 2011-03-11 15:23:49: LLA mapping error   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-11 17:17:36: pressure error   junam at snf.stanford.edu
  • Problem epi2 SNF 2011-03-11 17:17:36: pressure error   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-11 17:52:11: wafer stuck   junam at snf.stanford.edu
  • Problem epi2 SNF 2011-03-11 17:52:11: wafer stuck   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-12 16:30:22: wafers removed; okay to use   grahamab at snf.stanford.edu
  • Comment epi2 SNF 2011-03-12 16:30:22: wafers removed; okay to use   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error   narii at snf.stanford.edu
  • Problem epi2 SNF 2011-03-13 20:14:40: Wafer transfer error   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-03-14 12:13:25: LLB will not load, LLA stuck in error mode   fungus at snf.stanford.edu
  • Shutdown epi2 SNF 2011-03-14 12:13:25: LLB will not load, LLA stuck in error mode   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-14 19:32:33: wafer handler lost wafer, can't proceed   ehe at snf.stanford.edu
  • Problem epi2 SNF 2011-03-14 19:32:33: wafer handler lost wafer, can't proceed   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2011-03-15 10:14:56: wafer in chamber-broken pin   tberg at snf.stanford.edu
  • Shutdown epi2 SNF 2011-03-15 10:14:56: wafer in chamber-broken pin   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-15 14:08:56: wafer is removed   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-03-15 14:08:56: wafer is removed   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-16 14:11:25: LL pump not showing status   tberg at snf.stanford.edu
  • Problem epi2 SNF 2011-03-16 14:11:25: LL pump not showing status   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-18 00:05:12: Ge Etch Coat Pressure Error   edfei at snf.stanford.edu
• Comment epi2 SNF 2011-03-18 01:12:28: Ge Etch Coat Pressure Error   junam at snf.stanford.edu
• Comment epi2 SNF 2011-03-18 10:37:27: had another overpressure error last night   grahamab at snf.stanford.edu
• Problem epi2 SNF 2011-03-20 03:50:24: DCS Shut offNo dichlorosilane   mtang at snf.stanford.edu
  • Problem epi2 SNF 2011-03-20 03:50:24: DCS Shut offNo dichlorosilane   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-03-20 15:07:59: scrubber fault   junam at snf.stanford.edu
  • Problem epi2 SNF 2011-03-20 15:07:59: scrubber fault   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-21 09:25:19: removed wafer from transfer chamber   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-22 00:20:11: ChA failed to reach end condition error   jasonlin at snf.stanford.edu
• Shutdown epi2 SNF 2011-03-22 11:22:19: dome coated   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2011-03-22 11:22:19: dome coated   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-22 11:25:55: Ge etch recipe pressure 450torr   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-03-22 16:36:26: Devitrificated upper dome   maurice at snf.stanford.edu
  • Problem epi2 SNF 2011-03-22 16:36:26: Devitrificated upper dome   tberg at snf.stanford.edu
• Epi status update   Ted Berg
• Comment epi2 SNF 2011-03-25 07:50:11: Ready for test   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-03-29 12:30:24: Ge etch coat failed to reach temperature   narii at snf.stanford.edu
  • Comment epi2 SNF 2011-03-29 12:30:24: Ge etch coat failed to reach temperature   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-30 09:38:03: Dome inspected/ clear   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-03-31 07:51:44: cleaned scrubber and burnbox inlets   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-03-31 08:29:54: ran geetch coat   tberg at snf.stanford.edu

Last message date: Thu Mar 31 08:29:55 PDT 2011
Archived on: Sun Dec 23 08:52:58 PST 2012

• Messages sorted by: [ subject ] [ author ] [ date ]
• More info on this list...