From maurice at snf.stanford.edu Mon May 2 12:05:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 2 May 2011 12:05:57 -0700 Subject: Shutdown epi2 SNF 2011-04-29 13:43:32: No HCL flow Message-ID: HCl line purged with N2. - Ran program to check HCl ypass flow vs chamer pressure ~4 torr - (AAA HCLvspressure...or some name close to this...see directory for corect name) - Ran AAApoweretch without problems. - Ran 4 GeEtches with no problem. HCl pressure stayed at 24psia in reactor gas panel. - Modified step 7 of GE etch from HCl bypass to 980sccm so we can see HCl flow in the middle of the etch. From fungus at snf.stanford.edu Tue May 3 17:41:26 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Tue, 3 May 2011 17:41:26 -0700 Subject: Problem epi2 SNF 2011-05-03 17:41:26: LLA stuck Message-ID: LLA won't home and has had several faults. 4 of my wafers are still in there but I can't move them because of transfer slit errors. From maurice at snf.stanford.edu Wed May 4 11:47:49 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 May 2011 11:47:49 -0700 Subject: Shutdown epi2 SNF 2011-05-04 11:47:48: LL pump shutting doff Message-ID: LL pump shutting off. LLA door won't close. System believes door is closed. AMAT FS is being contacted From tberg at snf.stanford.edu Wed May 4 14:07:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 4 May 2011 14:07:23 -0700 Subject: Comment epi2 SNF 2011-05-04 14:07:22: looksb li9ke llpump is bad Message-ID: From tberg at snf.stanford.edu Thu May 5 08:51:22 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 May 2011 08:51:22 -0700 Subject: Comment epi2 SNF 2011-05-05 08:51:21: LL pump out for repair Message-ID: LL pump out for repair no eta for return yet From tberg at snf.stanford.edu Fri May 6 14:22:46 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 May 2011 14:22:46 -0700 Subject: Problem epi2 SNF 2011-05-03 17:41:26: LLA stuck Message-ID: Replaced LLpuymp after checkout- it is running fine. Checked both LLsand backfill in and out work fine as do doors From tberg at snf.stanford.edu Fri May 6 14:23:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 May 2011 14:23:03 -0700 Subject: Shutdown epi2 SNF 2011-05-04 11:47:48: LL pump shutting doff Message-ID: Replaced LLpuymp after checkout- it is running fine. Checked both LLsand backfill in and out work fine as do doors From tberg at snf.stanford.edu Fri May 6 14:23:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 May 2011 14:23:12 -0700 Subject: Comment epi2 SNF 2011-05-04 14:07:22: looksb li9ke llpump is bad Message-ID: Replaced LLpuymp after checkout- it is running fine. Checked both LLsand backfill in and out work fine as do doors From tberg at snf.stanford.edu Fri May 6 14:23:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 May 2011 14:23:23 -0700 Subject: Comment epi2 SNF 2011-05-05 08:51:21: LL pump out for repair Message-ID: Replaced LLpuymp after checkout- it is running fine. Checked both LLsand backfill in and out work fine as do doors From tberg at snf.stanford.edu Fri May 6 14:23:38 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 May 2011 14:23:38 -0700 Subject: Comment epi2 SNF 2011-04-28 20:42:43: Message-ID: From tberg at snf.stanford.edu Fri May 6 14:24:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 May 2011 14:24:27 -0700 Subject: Comment epi2 SNF 2011-05-06 14:24:27: Pumped and purged HCL line Message-ID: Pumped and purged HCL line . Running GE Etch coat at this time From fungus at snf.stanford.edu Fri May 6 17:54:18 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 6 May 2011 17:54:18 -0700 Subject: Problem epi2 SNF 2011-05-06 17:54:17: ChA pressure fault, isolated Message-ID: After epi came back up I started to run a Ge Etch Coat while cleaning wafers. ChA deviated from 760 to 600Torr and ChA went into isolation automatically. From fungus at snf.stanford.edu Fri May 6 18:16:19 2011 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 6 May 2011 18:16:19 -0700 Subject: Problem epi2 SNF 2011-05-06 18:16:18: Ge Etch Coat FAIL Message-ID: Tried to run Ge Etch Coat 2x with pressure deviation problems. Pressure +/-200Torr deviation from setpoint during Ge Etch Coat. Someone should take it down if this continues. I don't have enough time to troubleshoot. From junam at snf.stanford.edu Fri May 6 22:13:40 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 6 May 2011 22:13:40 -0700 Subject: Problem epi2 SNF 2011-05-06 22:13:40: pressure set point deviation error Message-ID: while running GE ET COATT recipe, chamber pressure set point deviation error occured. From dwnam at snf.stanford.edu Sat May 7 18:26:45 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Sat, 7 May 2011 18:26:45 -0700 Subject: Shutdown epi2 SNF 2011-05-07 18:26:45: Transfer arm is stuck in the LLA Message-ID: Cannot open LLA door. From narii at snf.stanford.edu Sun May 8 14:49:11 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 8 May 2011 14:49:11 -0700 Subject: Comment epi2 SNF 2011-05-08 14:49:11: Comment about shutdown Message-ID: There actually was one wafer on the blade which had been deleted. Create a wafer on the blade and unloaded it. Salvaged wafer is on Epi2 desk. I'm going to use Epi2 from now. Please charge me for using the machine from now till 9pm. From tberg at snf.stanford.edu Mon May 9 07:02:22 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:02:22 -0700 Subject: Problem epi2 SNF 2011-05-06 17:54:17: ChA pressure fault, isolated Message-ID: Ran GEetch coat with no pressure, flow or temp issues From tberg at snf.stanford.edu Mon May 9 07:02:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:02:44 -0700 Subject: Problem epi2 SNF 2011-05-06 18:16:18: Ge Etch Coat FAIL Message-ID: Ran GEetch coat with no pressure, flow or temp issues From tberg at snf.stanford.edu Mon May 9 07:03:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:03:03 -0700 Subject: Problem epi2 SNF 2011-05-06 22:13:40: pressure set point deviation error Message-ID: Ran GEetch coat with no pressure, flow or temp issues From tberg at snf.stanford.edu Mon May 9 07:03:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:03:23 -0700 Subject: Shutdown epi2 SNF 2011-05-07 18:26:45: Transfer arm is stuck in the LLA Message-ID: Other user removed wafer From tberg at snf.stanford.edu Mon May 9 07:03:43 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:03:43 -0700 Subject: Comment epi2 SNF 2011-05-06 14:24:27: Pumped and purged HCL line Message-ID: Ran GEetch coat with no pressure, flow or temp issues From tberg at snf.stanford.edu Mon May 9 07:04:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:04:06 -0700 Subject: Problem epi2 SNF 2011-04-28 17:40:29: FAULT HCL deviation 100% Message-ID: Ran GEetch coat with no pressure, flow or temp issues From tberg at snf.stanford.edu Mon May 9 07:04:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:04:21 -0700 Subject: Comment epi2 SNF 2011-04-28 09:26:22: dome coated Message-ID: temp is OK From tberg at snf.stanford.edu Mon May 9 07:04:48 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:04:48 -0700 Subject: Problem epi2 SNF 2011-04-27 22:44:16: Unable to Etch Chamber Message-ID: Dome is ok Ran GEetch coat with no pressure, flow or temp issues From tberg at snf.stanford.edu Mon May 9 07:05:01 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:05:01 -0700 Subject: Problem epi2 SNF 2011-04-29 11:41:09: HCL deviation by 70 % during standard etch recipe Message-ID: Ran GEetch coat with no pressure, flow or temp issues From tberg at snf.stanford.edu Mon May 9 07:05:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:05:13 -0700 Subject: Comment epi2 SNF 2011-04-28 20:45:07: HCl MFC line error Message-ID: Ran GEetch coat with no pressure, flow or temp issues From sclaussen at snf.stanford.edu Tue May 10 14:42:52 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 10 May 2011 14:42:52 -0700 Subject: Shutdown epi2 SNF 2011-05-10 14:42:51: Problem with Ch A pressure valve Message-ID: Pressure valve won't open all the way. Maurice said it needs to be shutdown and seen by maintenance. From tberg at snf.stanford.edu Wed May 11 07:15:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 May 2011 07:15:10 -0700 Subject: Shutdown epi2 SNF 2011-05-10 14:42:51: Problem with Ch A pressure valve Message-ID: Ceaned throttle valove, replaced with F-cup design. Ran geetchcoat no problems From zpatel at snf.stanford.edu Thu May 12 12:18:20 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 12 May 2011 12:18:20 -0700 Subject: Problem epi2 SNF 2011-05-12 12:18:19: Ge Etch coat failed Message-ID: Chamber A heater contactor OFF Chamber A low water flow From tberg at snf.stanford.edu Thu May 12 14:10:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 May 2011 14:10:12 -0700 Subject: Problem epi2 SNF 2011-05-12 12:18:19: Ge Etch coat failed Message-ID: Problem was facilities process cooling water problem. All is resolved now. Zubin is running as normal. From junil at snf.stanford.edu Sat May 14 08:01:35 2011 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Sat, 14 May 2011 08:01:35 -0700 Subject: Problem epi2 SNF 2011-05-14 08:01:35: wafer centerfinding error in the transfer chamber Message-ID: While running previous user's wafer, error message 'wafer too far off center for centerfinder to correct.' happened. One wafer still remains in the transfer chamber and I didn't know how to handle this situation I left the equipment as it was found. My reservation has been released. From narii at snf.stanford.edu Sat May 14 12:33:43 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 14 May 2011 12:33:43 -0700 Subject: Comment epi2 SNF 2011-05-14 12:33:42: Problem cleared Message-ID: Reset the system and pulled out wafer from handler. Looks working in auto mode. From sclaussen at snf.stanford.edu Mon May 16 17:54:59 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 16 May 2011 17:54:59 -0700 Subject: Problem epi2 SNF 2011-05-16 17:54:59: HCl flow deviating by 100% Message-ID: Can't run GE ETCH COAT From sclaussen at snf.stanford.edu Mon May 16 17:55:11 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 16 May 2011 17:55:11 -0700 Subject: Shutdown epi2 SNF 2011-05-16 17:55:11: HCl deviation Message-ID: From ehe at snf.stanford.edu Mon May 16 18:01:55 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 16 May 2011 18:01:55 -0700 Subject: Comment epi2 SNF 2011-05-16 18:01:55: active idle temp off Message-ID: Only heating to ~345C in active idle, slowly. Heats up quickly when running etch or other recipes though. From tberg at snf.stanford.edu Tue May 17 06:42:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 May 2011 06:42:12 -0700 Subject: Comment epi2 SNF 2011-05-17 06:42:11: changed HCl cylinder-leak check Message-ID: From tberg at snf.stanford.edu Tue May 17 13:44:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 May 2011 13:44:04 -0700 Subject: Comment epi2 SNF 2011-05-17 13:44:03: AMAT working on Software Message-ID: From ehe at snf.stanford.edu Tue May 17 15:14:50 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 17 May 2011 15:14:50 -0700 Subject: Comment epi2 SNF 2011-05-17 15:14:50: light pen not working very well Message-ID: Lately it's become very difficult to aim the light pen at the recipe arrows... tried changing the monitor display settings but didn't help. From tberg at snf.stanford.edu Wed May 18 07:49:38 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:49:38 -0700 Subject: Comment epi2 SNF 2011-05-08 14:49:11: Comment about shutdown Message-ID: noted From tberg at snf.stanford.edu Wed May 18 07:50:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:50:08 -0700 Subject: Problem epi2 SNF 2011-05-14 08:01:35: wafer centerfinding error in the transfer chamber Message-ID: Narii removed wafer, thanks From tberg at snf.stanford.edu Wed May 18 07:50:24 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:50:24 -0700 Subject: Comment epi2 SNF 2011-05-14 12:33:42: Problem cleared Message-ID: noted From tberg at snf.stanford.edu Wed May 18 07:51:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:51:41 -0700 Subject: Problem epi2 SNF 2011-05-16 17:54:59: HCl flow deviating by 100% Message-ID: HCL cylinder changed and leak checked overnight. Ran 3 Geetchcoats no problem. Dome is clear. may need further testing From tberg at snf.stanford.edu Wed May 18 07:51:52 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:51:52 -0700 Subject: Shutdown epi2 SNF 2011-05-16 17:55:11: HCl deviation Message-ID: HCL cylinder changed and leak checked overnight. Ran 3 Geetchcoats no problem. Dome is clear. may need further testing From tberg at snf.stanford.edu Wed May 18 07:52:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:52:08 -0700 Subject: Comment epi2 SNF 2011-05-16 18:01:55: active idle temp off Message-ID: HCL cylinder changed and leak checked overnight. Ran 3 Geetchcoats no problem. Dome is clear. may need further testing From tberg at snf.stanford.edu Wed May 18 07:52:16 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:52:16 -0700 Subject: Comment epi2 SNF 2011-05-17 06:42:11: changed HCl cylinder-leak check Message-ID: HCL cylinder changed and leak checked overnight. Ran 3 Geetchcoats no problem. Dome is clear. may need further testing From tberg at snf.stanford.edu Wed May 18 07:52:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:52:35 -0700 Subject: Comment epi2 SNF 2011-05-17 13:44:03: AMAT working on Software Message-ID: completed back to us From tberg at snf.stanford.edu Wed May 18 07:53:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 May 2011 07:53:04 -0700 Subject: Problem epi2 SNF 2011-05-18 07:53:03: may need further testing Message-ID: HCL cylinder changed and leak checked overnight. Ran 3 Geetchcoats no problem. Dome is clear. may need further testing From tberg at snf.stanford.edu Thu May 19 12:03:24 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 May 2011 12:03:24 -0700 Subject: Problem epi2 SNF 2011-05-18 07:53:03: may need further testing Message-ID: Several users have reported all looks good. From ehe at snf.stanford.edu Fri May 20 15:08:43 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 20 May 2011 15:08:43 -0700 Subject: Problem epi2 SNF 2011-05-20 15:08:43: DOP-1 deviation errors Message-ID: DOP-1 deviation occured ~15 times during recipes over past 3 days. Is DOP-1 running out? Is the valve ok? From tberg at stanford.edu Tue May 24 10:42:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 24 May 2011 10:42:30 -0700 Subject: Be sure and enable the tool Message-ID: <4DDBEE06.8020500@stanford.edu> Hello all, Be sure and enable the tool before beginning your session. A new feature has been added-if the tool is not enabled you will get the "cabinet door has been opened" and will not be able to reset it. This will also dump the temperature and gases if you disable during a run. This more severe interlock is a result of users taking advantage of the system. From tberg at snf.stanford.edu Tue May 24 10:43:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 May 2011 10:43:21 -0700 Subject: Comment epi2 SNF 2011-05-24 10:43:21: be sure and enable tool Message-ID: Hello all, Be sure and enable the tool before beginning your session. A new feature has been added-if the tool is not enabled you will get the "cabinet door has been opened" and will not be able to reset it. This will also dump the temperature and gases if you disable during a run. This more severe interlock is a result of users taking advantage of the system. From ehe at snf.stanford.edu Wed May 25 07:10:40 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 25 May 2011 07:10:40 -0700 Subject: Problem epi2 SNF 2011-05-25 07:10:39: wafer stuck in transfer chamber Message-ID: Second time in 3 days I've gotten the "wafer too far off center for center finder to find" error message. Not sure what the safest way to get it back is - should I delete/recreate wafer and retry transfer or could this end up breaking it...? From ehe at snf.stanford.edu Wed May 25 07:30:40 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 25 May 2011 07:30:40 -0700 Subject: Comment epi2 SNF 2011-05-25 07:30:40: anyone using DSP wafers Message-ID: Could the wafer slipping in the machine be because I'm using double-side-polished wafers? Is anyone else with DSP wafers having this problem? From tberg at snf.stanford.edu Wed May 25 07:58:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 May 2011 07:58:12 -0700 Subject: Problem epi2 SNF 2011-05-20 15:08:43: DOP-1 deviation errors Message-ID: Some errors occur when low end of MFC is used. pressures and nominal flows look OK From tberg at snf.stanford.edu Wed May 25 07:59:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 May 2011 07:59:27 -0700 Subject: Problem epi2 SNF 2011-05-25 07:10:39: wafer stuck in transfer chamber Message-ID: Wafer removed From junam at snf.stanford.edu Sat May 28 17:14:14 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sat, 28 May 2011 17:14:14 -0700 Subject: Problem epi2 SNF 2011-05-28 17:14:14: chamber a wafer slide detected Message-ID: "chamber a wafer slide detected" fault occured. previous user's wafer was sitting in chamber a, and the chamber was in active idle status, not running anyi recipe. i tried to transfer the wafer to lla manually, but "chamber a wafer slide detected" fault occured" fault occured. it seems thoug not appeared on the system (monitor wafer page), that particular slot in lla was occupied. cannot close the door between lla and transfer chamber. previous user's wafers are still sitting in lla, and the door between lla and transfer chamber is still open. From maurice at snf.stanford.edu Sun May 29 16:26:09 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 29 May 2011 16:26:09 -0700 Subject: Shutdown epi2 SNF 2011-05-29 16:26:09: Broken wafer in transfer chamber Message-ID: System was commanded to move a wafer into a slot that already had a wafer. - There is a broken wafer on the transfer wand in the transfer chamber. System down until Ted or Elmer can vent transfer chamber, remove wafer and chips from transfer chamber and inspect LLA slit. Transfer arm may need to be recalibrated also. - I removed one whole wafer from LLA and vacuumed up a lot of chips. The wafer cassette had been knocked off the load platform.