May 2011 Archives by author

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Starting: Mon May 2 12:05:57 PDT 2011
Ending: Sun May 29 16:26:09 PDT 2011
Messages: 57

Be sure and enable the tool Ted Berg
Shutdown epi2 SNF 2011-05-07 18:26:45: Transfer arm is stuck in the LLA dwnam at snf.stanford.edu
Comment epi2 SNF 2011-05-16 18:01:55: active idle temp off ehe at snf.stanford.edu
Comment epi2 SNF 2011-05-17 15:14:50: light pen not working very well ehe at snf.stanford.edu
Problem epi2 SNF 2011-05-20 15:08:43: DOP-1 deviation errors ehe at snf.stanford.edu
Problem epi2 SNF 2011-05-25 07:10:39: wafer stuck in transfer chamber ehe at snf.stanford.edu
Comment epi2 SNF 2011-05-25 07:30:40: anyone using DSP wafers ehe at snf.stanford.edu
Problem epi2 SNF 2011-05-03 17:41:26: LLA stuck fungus at snf.stanford.edu
Problem epi2 SNF 2011-05-06 17:54:17: ChA pressure fault, isolated fungus at snf.stanford.edu
Problem epi2 SNF 2011-05-06 18:16:18: Ge Etch Coat FAIL fungus at snf.stanford.edu
Problem epi2 SNF 2011-05-06 22:13:40: pressure set point deviation error junam at snf.stanford.edu
Problem epi2 SNF 2011-05-28 17:14:14: chamber a wafer slide detected junam at snf.stanford.edu
Problem epi2 SNF 2011-05-14 08:01:35: wafer centerfinding error in the transfer chamber junil at snf.stanford.edu
Shutdown epi2 SNF 2011-04-29 13:43:32: No HCL flow maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-05-04 11:47:48: LL pump shutting doff maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-05-29 16:26:09: Broken wafer in transfer chamber maurice at snf.stanford.edu
Comment epi2 SNF 2011-05-08 14:49:11: Comment about shutdown narii at snf.stanford.edu
Comment epi2 SNF 2011-05-14 12:33:42: Problem cleared narii at snf.stanford.edu
Shutdown epi2 SNF 2011-05-10 14:42:51: Problem with Ch A pressure valve sclaussen at snf.stanford.edu
Problem epi2 SNF 2011-05-16 17:54:59: HCl flow deviating by 100% sclaussen at snf.stanford.edu
Shutdown epi2 SNF 2011-05-16 17:55:11: HCl deviation sclaussen at snf.stanford.edu
Comment epi2 SNF 2011-05-04 14:07:22: looksb li9ke llpump is bad tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-05 08:51:21: LL pump out for repair tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-03 17:41:26: LLA stuck tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-05-04 11:47:48: LL pump shutting doff tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-04 14:07:22: looksb li9ke llpump is bad tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-05 08:51:21: LL pump out for repair tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-28 20:42:43: tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-06 14:24:27: Pumped and purged HCL line tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-06 17:54:17: ChA pressure fault, isolated tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-06 18:16:18: Ge Etch Coat FAIL tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-06 22:13:40: pressure set point deviation error tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-05-07 18:26:45: Transfer arm is stuck in the LLA tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-06 14:24:27: Pumped and purged HCL line tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-28 17:40:29: FAULT HCL deviation 100% tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-28 09:26:22: dome coated tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-27 22:44:16: Unable to Etch Chamber tberg at snf.stanford.edu
Problem epi2 SNF 2011-04-29 11:41:09: HCL deviation by 70 % during standard etch recipe tberg at snf.stanford.edu
Comment epi2 SNF 2011-04-28 20:45:07: HCl MFC line error tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-05-10 14:42:51: Problem with Ch A pressure valve tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-12 12:18:19: Ge Etch coat failed tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-17 06:42:11: changed HCl cylinder-leak check tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-17 13:44:03: AMAT working on Software tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-08 14:49:11: Comment about shutdown tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-14 08:01:35: wafer centerfinding error in the transfer chamber tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-14 12:33:42: Problem cleared tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-16 17:54:59: HCl flow deviating by 100% tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-05-16 17:55:11: HCl deviation tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-16 18:01:55: active idle temp off tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-17 06:42:11: changed HCl cylinder-leak check tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-17 13:44:03: AMAT working on Software tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-18 07:53:03: may need further testing tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-18 07:53:03: may need further testing tberg at snf.stanford.edu
Comment epi2 SNF 2011-05-24 10:43:21: be sure and enable tool tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-20 15:08:43: DOP-1 deviation errors tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-25 07:10:39: wafer stuck in transfer chamber tberg at snf.stanford.edu
Problem epi2 SNF 2011-05-12 12:18:19: Ge Etch coat failed zpatel at snf.stanford.edu

Last message date: Sun May 29 16:26:09 PDT 2011
Archived on: Sun Dec 23 08:52:59 PST 2012

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