From dwnam at snf.stanford.edu Wed Nov 2 01:34:18 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Wed, 2 Nov 2011 01:34:18 -0700 Subject: Problem epi2 SNF 2011-11-02 01:34:17: Error : Slit open to LLB Message-ID: Due to blade positioning error, slit to LLB does not close. Cannot run anything. From tberg at snf.stanford.edu Wed Nov 2 06:28:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Nov 2011 06:28:53 -0700 Subject: Shutdown epi2 SNF 2011-11-02 06:28:52: Having to vent transfer chamber Message-ID: From tberg at snf.stanford.edu Wed Nov 2 07:12:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Nov 2011 07:12:06 -0700 Subject: Shutdown epi2 SNF 2011-11-02 06:28:52: Having to vent transfer chamber Message-ID: Vented Transfer Chamber and removed trapped wafer. Put in slot 25. Removed wafers from LL. Running GEetch coat From tberg at snf.stanford.edu Wed Nov 2 07:13:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Nov 2011 07:13:03 -0700 Subject: Problem epi2 SNF 2011-11-02 01:34:17: Error : Slit open to LLB Message-ID: Vented Transfer Chamber and removed trapped wafer. Put in slot 25. Removed wafers from LL. Running GEetch coat From tberg at snf.stanford.edu Wed Nov 2 08:07:18 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Nov 2011 08:07:18 -0700 Subject: Shutdown epi2 SNF 2011-11-02 08:07:17: Base pressure too high Message-ID: From tberg at snf.stanford.edu Wed Nov 2 09:27:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Nov 2011 09:27:14 -0700 Subject: Shutdown epi2 SNF 2011-11-02 08:07:17: Base pressure too high Message-ID: Checked base of pump and reassembled base is Ok. Ok to run From tberg at snf.stanford.edu Thu Nov 3 13:23:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 Nov 2011 13:23:34 -0700 Subject: Comment epi2 SNF 2011-10-31 14:04:02: Epi is available Message-ID: noted From tberg at snf.stanford.edu Thu Nov 3 13:23:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 Nov 2011 13:23:50 -0700 Subject: Comment epi2 SNF 2011-11-03 13:23:50: Epi Is available Message-ID: From sclaussen at snf.stanford.edu Sun Nov 6 00:16:56 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 6 Nov 2011 00:16:56 -0700 Subject: Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy Message-ID: A SiGe wafer annealed at our previous anneal temperature (850C) came out looking exactly like it did last weekend. Shawn the AMAT tech said the bottom dome looked coated. I ran 3 GE ETCH COAT recipes preior to my run, and they apparently didn't help. From sclaussen at snf.stanford.edu Sun Nov 6 00:40:23 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 6 Nov 2011 00:40:23 -0700 Subject: Problem epi2 SNF 2011-11-06 00:40:22: "Ch A HEATER contactor off" error Message-ID: Received this error during GE ETCH COAT process. Process aborted automatically, then gave the error "Chamber A low water flow". Brought chamber back online and tried to run GE ETCH COAT again. Received same error, but at a different point in the recipe. From wangss at snf.stanford.edu Sun Nov 6 11:30:33 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sun, 6 Nov 2011 11:30:33 -0800 Subject: Problem epi2 SNF 2011-11-06 11:30:33: can not run any process Message-ID: "Heater contactor off" error and "Low water flow" error happen persistently when I try to bring the chamber to hot idle. From wangss at snf.stanford.edu Sun Nov 6 11:52:40 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sun, 6 Nov 2011 11:52:40 -0800 Subject: Shutdown epi2 SNF 2011-11-06 11:52:39: "heater contactor off "and "Low water Flow" Message-ID: can not even bring the chamber to hot idle condition From tberg at snf.stanford.edu Mon Nov 7 07:24:16 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Nov 2011 07:24:16 -0800 Subject: Problem epi2 SNF 2011-11-06 00:40:22: "Ch A HEATER contactor off" error Message-ID: Found loose quick connect-reseated. Now system is responding correctly. Ran GEetch coat no problem. From tberg at snf.stanford.edu Mon Nov 7 07:24:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Nov 2011 07:24:25 -0800 Subject: Problem epi2 SNF 2011-11-06 11:30:33: can not run any process Message-ID: Found loose quick connect-reseated. Now system is responding correctly. Ran GEetch coat no problem. From tberg at snf.stanford.edu Mon Nov 7 07:24:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Nov 2011 07:24:33 -0800 Subject: Shutdown epi2 SNF 2011-11-06 11:52:39: "heater contactor off "and "Low water Flow" Message-ID: Found loose quick connect-reseated. Now system is responding correctly. Ran GEetch coat no problem. From tberg at snf.stanford.edu Mon Nov 7 07:24:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Nov 2011 07:24:44 -0800 Subject: Comment epi2 SNF 2011-11-03 13:23:50: Epi Is available Message-ID: noted From tberg at snf.stanford.edu Mon Nov 7 07:25:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Nov 2011 07:25:02 -0800 Subject: Comment epi2 SNF 2011-10-31 07:54:40: Ran GeEtch coat Message-ID: noted From tberg at snf.stanford.edu Mon Nov 7 07:25:18 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Nov 2011 07:25:18 -0800 Subject: Comment epi2 SNF 2011-10-20 07:16:42: new germane cylinder online Message-ID: noted From tberg at stanford.edu Mon Nov 7 07:30:13 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 07 Nov 2011 07:30:13 -0800 Subject: Epi is available Message-ID: <4EB7F985.9090406@stanford.edu> Hello All, Resolved water flow issues ran GEETCH coat. No problem. Its available. Teed From edfei at snf.stanford.edu Mon Nov 7 16:03:11 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Mon, 7 Nov 2011 16:03:11 -0800 Subject: Problem epi2 SNF 2011-11-07 16:03:10: Do not use Slot 7 in LLB Message-ID: Hot wafer was put into the slot and is stuck. All other slots ok. From dwnam at snf.stanford.edu Tue Nov 8 23:27:20 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Tue, 8 Nov 2011 23:27:20 -0800 Subject: Problem epi2 SNF 2011-11-08 23:27:19: SiGe growth problem Message-ID: It seems like SiGe is not growing at all. Something is wrong with the growth rate(Temperature problem??) From sclaussen at snf.stanford.edu Tue Nov 15 17:15:05 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 15 Nov 2011 17:15:05 -0800 Subject: Problem epi2 SNF 2011-11-15 17:15:05: Error re: system pressure Message-ID: Running "MO ETCH". Received error "System detected abnormal pressure rise from 585 to 760 Torr" and went offline. From eldwin at snf.stanford.edu Thu Nov 17 17:24:48 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Thu, 17 Nov 2011 17:24:48 -0800 Subject: Shutdown epi2 SNF 2011-11-17 17:24:48: wafer stuck on handler Message-ID: wafer not detected, looks off-centered in transfer chamber, or perhaps polysi deposited was rough and cannot be sensed From tberg at snf.stanford.edu Fri Nov 18 07:38:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 Nov 2011 07:38:34 -0800 Subject: Shutdown epi2 SNF 2011-11-17 17:24:48: wafer stuck on handler Message-ID: Removed wafer. Wafer was quite dull and had slipped on transfer arm. From wangss at snf.stanford.edu Fri Nov 18 14:07:31 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Fri, 18 Nov 2011 14:07:31 -0800 Subject: Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad Message-ID: a lot of black particles on the surface, suspect the dome is seriously coated. Can not bring chamber to Hot idle. Temperature can not rise above 300C. From eldwin at snf.stanford.edu Fri Nov 18 14:38:41 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Fri, 18 Nov 2011 14:38:41 -0800 Subject: Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle Message-ID: problem as desctribed above. Unable to bring to active idle (temp<300C) after running silane deposited polysilicon wafer yesterday. From maurice at snf.stanford.edu Fri Nov 18 15:59:08 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Nov 2011 15:59:08 -0800 Subject: Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle Message-ID: Ran "poweretch" 2 times to clean up chamber. System is now reaching hot and active idle temps. From maurice at snf.stanford.edu Fri Nov 18 15:59:39 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Nov 2011 15:59:39 -0800 Subject: Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad Message-ID: Ran "poweretch" 2 times to clean up chamber. System is now reaching hot and active idle temps. From wangss at snf.stanford.edu Fri Nov 18 16:54:27 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Fri, 18 Nov 2011 16:54:27 -0800 Subject: Shutdown epi2 SNF 2011-11-18 16:54:27: wafer stuck Message-ID: wafer is still inside the machine, but the handler can not find it. From maurice at snf.stanford.edu Sat Nov 19 12:39:47 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 19 Nov 2011 12:39:47 -0800 Subject: Shutdown epi2 SNF 2011-11-18 16:54:27: wafer stuck Message-ID: User aborted sequence while robot was moving. Robot lost it's position and sheared off a quarts pin in the cooling chamber and droped wafer in the transfer chamber. - Sean (AMAT FS) vented transfer chamber and recovered wafer. He remover broken pin and cut a process chamber pin to the correct length to use in the cooling chamber. Homed all robots and brought all chambers back on line. - We need to order more chamber pins. From cfchiang at snf.stanford.edu Sun Nov 20 21:23:47 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 20 Nov 2011 21:23:47 -0800 Subject: Shutdown epi2 SNF 2011-11-20 21:23:46: N2 purge overnight for dome replacement Message-ID: From cfchiang at snf.stanford.edu Sun Nov 20 21:38:40 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 20 Nov 2011 21:38:40 -0800 Subject: Problem epi2 SNF 2011-11-20 21:38:40: low water flow errors Message-ID: Encountered this error during (1) first attempt to bring the system to hot idle and (2) both of the two trials when running "Ge Etch Coat" recipe. From maurice at snf.stanford.edu Wed Nov 23 16:31:27 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 23 Nov 2011 16:31:27 -0800 Subject: Problem epi2 SNF 2011-11-23 16:31:26: Active idle temp turned up Message-ID: Active idle temp increased from 15 kw to 18 kw for bake out From maurice at snf.stanford.edu Fri Nov 25 09:49:34 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 09:49:34 -0800 Subject: Problem epi2 SNF 2011-11-23 16:31:26: Active idle temp turned up Message-ID: Active idle power returned 15kw From maurice at snf.stanford.edu Fri Nov 25 09:50:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 09:50:17 -0800 Subject: Problem epi2 SNF 2011-11-15 17:15:05: Error re: system pressure Message-ID: Have not seen problem again. From maurice at snf.stanford.edu Fri Nov 25 09:50:37 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 09:50:37 -0800 Subject: Problem epi2 SNF 2011-11-08 23:27:19: SiGe growth problem Message-ID: bottom dome replaced From maurice at snf.stanford.edu Fri Nov 25 09:50:53 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 09:50:53 -0800 Subject: Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy Message-ID: lower dome replaced From maurice at snf.stanford.edu Fri Nov 25 09:51:09 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 09:51:09 -0800 Subject: Problem epi2 SNF 2011-10-26 18:08:20: Hazy Wafers Message-ID: lower dome changed out From maurice at snf.stanford.edu Fri Nov 25 09:54:12 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 09:54:12 -0800 Subject: Problem epi2 SNF 2011-10-26 02:12:31: SiH4 flow deviation error Message-ID: User is trying to run 38sccm on a 500sccm MFC Process would be more stable if the flow wasn't at the bottom of the MFC range From maurice at snf.stanford.edu Fri Nov 25 11:48:58 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:48:58 -0800 Subject: Problem epi2 SNF 2011-11-20 21:38:40: low water flow errors Message-ID: We have run for 2 days with no water issues From maurice at snf.stanford.edu Fri Nov 25 11:55:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:55:19 -0800 Subject: Shutdown epi2 SNF 2011-11-20 21:23:46: N2 purge overnight for dome replacement Message-ID: Lower dome replacement complete. System has been backed for 1.5 days. - Six long etches done on system. Si depositions look clean and haze free. - (No water errors since Sunday) From maurice at snf.stanford.edu Fri Nov 25 11:56:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:56:38 -0800 Subject: Comment epi2 SNF 2011-10-10 16:52:44: sensitivity increased Message-ID: logged From wangss at snf.stanford.edu Fri Nov 25 16:41:43 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Fri, 25 Nov 2011 16:41:43 -0800 Subject: Problem epi2 SNF 2011-11-25 16:41:42: Pressure is not stablized Message-ID: Process aborted after finish two runs, and one wafer is in transfer chamber. Can not load/unload wafers from or to LLB. Error Message: Can not close CHA, slit valve is open Error: LLB indexer move to a slot is unsafe. From eldwin at snf.stanford.edu Fri Nov 25 17:08:18 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Fri, 25 Nov 2011 17:08:18 -0800 Subject: Comment epi2 SNF 2011-11-25 17:08:17: resolved handler problem Message-ID: Did a home robot axis twice and handler is ok now and running fine. Still getting pressure deviation warnings on Ch A. From ehe at snf.stanford.edu Sat Nov 26 19:46:44 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 26 Nov 2011 19:46:44 -0800 Subject: Problem epi2 SNF 2011-11-26 19:46:44: SiH4 flow deviation 12% - out of gas? Message-ID: From ehe at snf.stanford.edu Sat Nov 26 19:47:01 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 26 Nov 2011 19:47:01 -0800 Subject: Problem epi2 SNF 2011-11-26 19:47:01: transfer slit valve not opening, can't remove wafer from txfer chamber Message-ID: From cfchiang at snf.stanford.edu Sun Nov 27 11:45:05 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 27 Nov 2011 11:45:05 -0800 Subject: Problem epi2 SNF 2011-11-27 11:45:05: retrieved wafers Message-ID: Previous user's wafers have been retrieved and returned to the single wafer carriers. From maurice at snf.stanford.edu Sun Nov 27 15:43:55 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 27 Nov 2011 15:43:55 -0800 Subject: Problem epi2 SNF 2011-11-27 11:45:05: retrieved wafers Message-ID: thank you From maurice at snf.stanford.edu Sun Nov 27 15:44:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 27 Nov 2011 15:44:29 -0800 Subject: Problem epi2 SNF 2011-11-26 19:47:01: transfer slit valve not opening, can't remove wafer from txfer chamber Message-ID: cfchaing removed wafer From maurice at snf.stanford.edu Sun Nov 27 15:45:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 27 Nov 2011 15:45:02 -0800 Subject: Comment epi2 SNF 2011-11-25 17:08:17: resolved handler problem Message-ID: thank you From maurice at snf.stanford.edu Sun Nov 27 15:45:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 27 Nov 2011 15:45:41 -0800 Subject: Problem epi2 SNF 2011-11-25 16:41:42: Pressure is not stablized Message-ID: Eldwin removed wafer