Problem epi2 SNF 2011-11-02 01:34:17: Error : Slit open to LLB

tberg at snf.stanford.edu tberg at snf.stanford.edu
Wed Nov 2 07:13:03 PDT 2011


Vented Transfer Chamber and removed trapped wafer. Put in slot 25. Removed wafers from LL. Running GEetch coat




More information about the epi2-pcs mailing list