Problem epi2 SNF 2011-11-02 01:34:17: Error : Slit open to LLB

tberg at snf.stanford.edu tberg at snf.stanford.edu
Wed Nov 2 07:13:03 PDT 2011

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Vented Transfer Chamber and removed trapped wafer. Put in slot 25. Removed wafers from LL. Running GEetch coat

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