Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Sun Nov 6 00:16:56 PDT 2011


A SiGe wafer annealed at our previous anneal temperature (850C) came out looking exactly like it did last weekend. Shawn the AMAT tech said the bottom dome looked coated. I ran 3 GE ETCH COAT recipes preior to my run, and they apparently didn't help.




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