Problem epi2 SNF 2011-11-06 00:40:22: "Ch A HEATER contactor off" error

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Sun Nov 6 00:40:23 PDT 2011


Received this error during GE ETCH COAT process. Process aborted automatically, then gave the error "Chamber A low water flow". Brought chamber back online and tried to run GE ETCH COAT again. Received same error, but at a different point in the recipe.




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