Shutdown epi2 SNF 2011-11-17 17:24:48: wafer stuck on handler

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Thu Nov 17 17:24:48 PST 2011


wafer not detected, looks off-centered in transfer chamber, or perhaps polysi deposited was rough and cannot be sensed




More information about the epi2-pcs mailing list