Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad

wangss at snf.stanford.edu wangss at snf.stanford.edu
Fri Nov 18 14:07:31 PST 2011


a lot of black particles on the surface, suspect the dome is seriously coated. Can not bring chamber to Hot idle. Temperature can not rise above 300C. 




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