Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Fri Nov 18 14:38:41 PST 2011

Previous message: Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad
Next message: Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

problem as desctribed above. Unable to bring to active idle (temp<300C) after running silane deposited polysilicon wafer yesterday.

Previous message: Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad
Next message: Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list