Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Fri Nov 18 14:38:41 PST 2011


problem as desctribed above. Unable to bring to active idle (temp<300C) after running silane deposited polysilicon wafer yesterday.




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