Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Nov 18 15:59:39 PST 2011


Ran "poweretch" 2 times to clean up chamber.  System is now reaching hot and active idle temps.




More information about the epi2-pcs mailing list