Shutdown epi2 SNF 2011-11-18 16:54:27: wafer stuck

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sat Nov 19 12:39:47 PST 2011


User aborted sequence while robot was moving.
Robot lost it's position and sheared off a quarts pin in the cooling chamber and droped wafer in the transfer chamber.
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Sean (AMAT FS) vented transfer chamber and recovered wafer.  He remover broken pin and cut a process chamber pin to the correct length to use in the cooling chamber.  Homed all robots and brought all chambers back on line.
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We need to order more chamber pins.




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