Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Nov 25 09:50:53 PST 2011
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Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy
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Problem epi2 SNF 2011-11-06 00:40:22: "Ch A HEATER contactor off" error
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lower dome replaced
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Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy
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Problem epi2 SNF 2011-11-06 00:40:22: "Ch A HEATER contactor off" error
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