Problem epi2 SNF 2011-10-26 02:12:31: SiH4 flow deviation error

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Nov 25 09:54:12 PST 2011


User is trying to run 38sccm on a 500sccm MFC
Process would be more stable if the flow wasn't at the bottom of the MFC range




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