Shutdown epi2 SNF 2011-11-20 21:23:46: N2 purge overnight for dome replacement

maurice at maurice at
Fri Nov 25 11:55:19 PST 2011

Lower dome replacement complete.
System has been backed for 1.5 days.
Six long etches done on system.
Si depositions look clean and haze free.
(No water errors since Sunday)

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