Shutdown epi2 SNF 2011-11-20 21:23:46: N2 purge overnight for dome replacement

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Nov 25 11:55:19 PST 2011


Lower dome replacement complete.
System has been backed for 1.5 days.
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Six long etches done on system.
Si depositions look clean and haze free.
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(No water errors since Sunday)




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