Problem epi2 SNF 2011-11-25 16:41:42: Pressure is not stablized

wangss at snf.stanford.edu wangss at snf.stanford.edu
Fri Nov 25 16:41:43 PST 2011


Process aborted after finish two runs, and one wafer is in transfer chamber. Can not load/unload wafers from or to LLB.
Error Message: Can not close CHA, slit valve is open
Error: LLB indexer move to a slot is unsafe.




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