Problem epi2 SNF 2011-11-26 19:46:44: SiH4 flow deviation 12% - out of gas?
ehe at snf.stanford.edu
ehe at snf.stanford.edu
Sat Nov 26 19:46:44 PST 2011
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Comment epi2 SNF 2011-11-25 17:08:17: resolved handler problem
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Problem epi2 SNF 2011-11-26 19:47:01: transfer slit valve not opening, can't remove wafer from txfer chamber
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Comment epi2 SNF 2011-11-25 17:08:17: resolved handler problem
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Problem epi2 SNF 2011-11-26 19:47:01: transfer slit valve not opening, can't remove wafer from txfer chamber
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