Problem epi2 SNF 2011-11-27 11:45:05: retrieved wafers

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Sun Nov 27 11:45:05 PST 2011

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Previous user's wafers have been retrieved and returned to the single wafer carriers.

Previous message: Problem epi2 SNF 2011-11-26 19:47:01: transfer slit valve not opening, can't remove wafer from txfer chamber
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