November 2011 Archives by author

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Starting: Wed Nov 2 01:34:18 PDT 2011
Ending: Sun Nov 27 15:45:41 PST 2011
Messages: 51

Epi is available Ted Berg
Shutdown epi2 SNF 2011-11-20 21:23:46: N2 purge overnight for dome replacement cfchiang at snf.stanford.edu
Problem epi2 SNF 2011-11-20 21:38:40: low water flow errors cfchiang at snf.stanford.edu
Problem epi2 SNF 2011-11-27 11:45:05: retrieved wafers cfchiang at snf.stanford.edu
Problem epi2 SNF 2011-11-02 01:34:17: Error : Slit open to LLB dwnam at snf.stanford.edu
Problem epi2 SNF 2011-11-08 23:27:19: SiGe growth problem dwnam at snf.stanford.edu
Problem epi2 SNF 2011-11-07 16:03:10: Do not use Slot 7 in LLB edfei at snf.stanford.edu
Problem epi2 SNF 2011-11-26 19:46:44: SiH4 flow deviation 12% - out of gas? ehe at snf.stanford.edu
Problem epi2 SNF 2011-11-26 19:47:01: transfer slit valve not opening, can't remove wafer from txfer chamber ehe at snf.stanford.edu
Shutdown epi2 SNF 2011-11-17 17:24:48: wafer stuck on handler eldwin at snf.stanford.edu
Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle eldwin at snf.stanford.edu
Comment epi2 SNF 2011-11-25 17:08:17: resolved handler problem eldwin at snf.stanford.edu
Shutdown epi2 SNF 2011-11-18 14:38:40: unable to bring to active idle maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-11-18 16:54:27: wafer stuck maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-23 16:31:26: Active idle temp turned up maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-23 16:31:26: Active idle temp turned up maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-15 17:15:05: Error re: system pressure maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-08 23:27:19: SiGe growth problem maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy maurice at snf.stanford.edu
Problem epi2 SNF 2011-10-26 18:08:20: Hazy Wafers maurice at snf.stanford.edu
Problem epi2 SNF 2011-10-26 02:12:31: SiH4 flow deviation error maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-20 21:38:40: low water flow errors maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-11-20 21:23:46: N2 purge overnight for dome replacement maurice at snf.stanford.edu
Comment epi2 SNF 2011-10-10 16:52:44: sensitivity increased maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-27 11:45:05: retrieved wafers maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-26 19:47:01: transfer slit valve not opening, can't remove wafer from txfer chamber maurice at snf.stanford.edu
Comment epi2 SNF 2011-11-25 17:08:17: resolved handler problem maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-25 16:41:42: Pressure is not stablized maurice at snf.stanford.edu
Problem epi2 SNF 2011-11-06 00:16:55: Wafers still hazy sclaussen at snf.stanford.edu
Problem epi2 SNF 2011-11-06 00:40:22: "Ch A HEATER contactor off" error sclaussen at snf.stanford.edu
Problem epi2 SNF 2011-11-15 17:15:05: Error re: system pressure sclaussen at snf.stanford.edu
Shutdown epi2 SNF 2011-11-02 06:28:52: Having to vent transfer chamber tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-11-02 06:28:52: Having to vent transfer chamber tberg at snf.stanford.edu
Problem epi2 SNF 2011-11-02 01:34:17: Error : Slit open to LLB tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-11-02 08:07:17: Base pressure too high tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-11-02 08:07:17: Base pressure too high tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-31 14:04:02: Epi is available tberg at snf.stanford.edu
Comment epi2 SNF 2011-11-03 13:23:50: Epi Is available tberg at snf.stanford.edu
Problem epi2 SNF 2011-11-06 00:40:22: "Ch A HEATER contactor off" error tberg at snf.stanford.edu
Problem epi2 SNF 2011-11-06 11:30:33: can not run any process tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-11-06 11:52:39: "heater contactor off "and "Low water Flow" tberg at snf.stanford.edu
Comment epi2 SNF 2011-11-03 13:23:50: Epi Is available tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-31 07:54:40: Ran GeEtch coat tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-20 07:16:42: new germane cylinder online tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-11-17 17:24:48: wafer stuck on handler tberg at snf.stanford.edu
Problem epi2 SNF 2011-11-06 11:30:33: can not run any process wangss at snf.stanford.edu
Shutdown epi2 SNF 2011-11-06 11:52:39: "heater contactor off "and "Low water Flow" wangss at snf.stanford.edu
Problem epi2 SNF 2011-11-18 14:07:31: wafer from yesterday is really really bad wangss at snf.stanford.edu
Shutdown epi2 SNF 2011-11-18 16:54:27: wafer stuck wangss at snf.stanford.edu
Problem epi2 SNF 2011-11-25 16:41:42: Pressure is not stablized wangss at snf.stanford.edu

Last message date: Sun Nov 27 15:45:41 PST 2011
Archived on: Sun Dec 23 08:53:01 PST 2012

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