Problem epi2 SNF 2011-10-06 10:00:13: DOP1 flow error

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Thu Oct 6 10:00:13 PDT 2011


Flow deviated by 24% and aborted the recipe. On a process wafer. One of 5 that I have from collaborators. I thought this problem was resolved?




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