Comment epi2 SNF 2011-09-15 11:57:02: flowed GeH4 manually
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Thu Oct 13 07:57:58 PDT 2011
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Problem epi2 SNF 2011-09-29 08:52:49: Ch A pressure setpoint deviation error
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Noted
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Problem epi2 SNF 2011-09-29 08:52:49: Ch A pressure setpoint deviation error
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Problem epi2 SNF 2011-10-13 10:09:16: ge etch coat recipe got aborted
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