Problem epi2 SNF 2011-10-13 10:09:16: ge etch coat recipe got aborted
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Thu Oct 13 10:50:35 PDT 2011
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Problem epi2 SNF 2011-10-13 10:09:16: ge etch coat recipe got aborted
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Comment epi2 SNF 2011-10-13 10:52:45: Dope1 switched to ASH3
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Ran GEetch coat no problem
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Problem epi2 SNF 2011-10-13 10:09:16: ge etch coat recipe got aborted
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Comment epi2 SNF 2011-10-13 10:52:45: Dope1 switched to ASH3
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