Comment epi2 SNF 2011-10-13 10:52:45: Dope1 switched to ASH3

tberg at snf.stanford.edu tberg at snf.stanford.edu
Thu Oct 13 10:52:45 PDT 2011


turned off PH3 to dopant 1 pumped it out. Switched to Arsine and flowed to vent it was very stable at approximately 25 PSI.




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